A Mo-Cu superconducting transition-edge microcalorimeter with 4.5 eV energy resolution at 6 keV

被引:121
作者
Irwin, KD [1 ]
Hilton, GC [1 ]
Martinis, JM [1 ]
Deiker, S [1 ]
Bergren, N [1 ]
Nam, SW [1 ]
Rudman, DA [1 ]
Wollman, DA [1 ]
机构
[1] Natl Inst Stand & Technol, Boulder, CO 80303 USA
基金
美国国家航空航天局;
关键词
D O I
10.1016/S0168-9002(99)01354-6
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We describe a superconducting transition-edge microcalorimeter with an energy resolution of 4.5 +/- 0.1 eV full-width at half-maximum (FWHM) for Mn K alpha X-rays from an Fe-55 source. The thermometer consists of a photolithographically patterned Mo-Cu superconducting proximity bilayer with a 93 mK transition temperature The device is fabricated on a Si3N4 membrane patterned as a "flyswatter" to control the thermal conductance to the heat bath. The sensor is voltage biased with an on-chip shunt resistor, and the current is measured by a two-stage SQUID amplifier consisting of a single first-stage SQUID and a series-array second-stage SQUID. Published by Elsevier Science B.V.
引用
收藏
页码:184 / 187
页数:4
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