Growth and dielectric behavior of radio frequency magnetron-sputtered lead magnesium niobate thin films

Lead magnesium niobate (PMN) thin films have been grown on quartz/Cr/Au substrates from a single target source by rf magnetron sputtering at room temperature. Sputtering parameters and the post-annealing temperature have been optimized to obtain phase pure PMN films. Grain sizes, obtained from atomic force microscopy and x-ray line broadening, show nanosized grains of nearly 45 nm. Dielectric response of photolithographically patterned quartz/Cr/Au/PMN/Au structures have been studied. The effect of film thickness and frequency on the dielectric constant has been examined at room temperature. The dielectric constant and remanent polarization show linear thickness dependence. (C) 2002 American Institute of Physics.