Reactive MBE growth of GaN and GaN:H on GaN/SiC substrates

被引:31
作者
Johnson, MAL
Yu, ZH
Boney, C
Hughes, WC
Cook, JW
Schetzina, JF
Zhao, H
Skromme, BJ
Edmond, JA
机构
来源
III-V NITRIDES | 1997年 / 449卷
关键词
D O I
10.1557/PROC-449-215
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Reactive N and H, created using rf plasma sources, were used to grow undoped GaN along with p-type GaN:Mg and p-type GaN:Mg:H thin films. By comparing the optical emission spectra from several rf sources with observed GaN grow rates, we deduce that nitrogen atoms and 1st-positive series nitrogen molecules (3.95 eV binding energy) are the reactive species responsible for GaN film growth. A Mg ground state acceptor binding energy of about 224 meV was determined from low temperature photoluminescence (PL) experiments for both p-type GaN:Mg and p-type GaN:Mg:H films.
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页码:215 / 220
页数:6
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