On the origin of surface smoothing by energetic cluster impact: Molecular dynamics simulation and mesoscopic modeling

被引：75

作者：

Moseler, M ^{[1
]}

Rattunde, O

Nordiek, J

Haberland, H

机构：

[1] Georgia Inst Technol, Sch Phys, Atlanta, GA 30332 USA

[2] Freiburger Mat Res Ctr, D-79104 Freiburg, Germany

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2000年 / 164卷

关键词：

D O I：

10.1016/S0168-583X(99)01081-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Energetic cluster impacts have been applied for the production of high quality thin films as well as a tool for smoothing rough surfaces. Molecular dynamic (MD) simulations of cluster-surface collisions provide the following picture for the underlying microscopic mechanism the impact of an energetic cluster onto a tilted Dart of the substrate induces a downhill particle current (consisting of both cluster and surface atoms) transferring the higher lying parts of the surface profile into the valleys. This effect is more pronounced for high kinetic energies. Based on these microscopic results, a mesoscopic model employing stochastic differential equations (SDE) has been formulated and allowing a quantitative explanation of experimental results from atomic force microscope measurements. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：522 / 536

页数：15

共 33 条

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