Highly charged ion based time-of-flight emission microscope

被引：11

作者：

Hamza, AV ^{[1
]}

Barnes, AV ^{[1
]}

Magee, E ^{[1
]}

Newman, M ^{[1
]}

Schenkel, T ^{[1
]}

McDonald, JW ^{[1
]}

Schneider, DH ^{[1
]}

机构：

[1] Univ Calif Lawrence Livermore Natl Lab, Livermore, CA 94551 USA

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2000年 / 71卷 / 05期

关键词：

D O I：

10.1063/1.1150582

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

An emission microscope using highly charged ions as the excitation source has been designed, constructed, and operated. A novel "acorn" objective lens has been used to simultaneously image electron and secondary ion emission. A resistive anode-position sensitive detector is used to determine the x-y position and time of arrival of the secondary events at the microscope image plane. Contrast in the image can be based on the intensity of the electron emission and/or the presence of particular secondary ions. Spatial resolution of better than 1 mu m and mass resolution m/Delta m of better than 400 were demonstrated. Background rejection from uncorrelated events of greater than an order of magnitude is also achieved. (C) 2000 American Institute of Physics. [S0034-6748(00)03105-1].

引用

页码：2077 / 2081

页数：5

共 16 条

[1] EMISSION OF ELECTRONS FROM A CLEAN GOLD SURFACE-INDUCED BY SLOW, VERY HIGHLY-CHARGED IONS AT THE IMAGE CHARGE ACCELERATION LIMIT [J].

AUMAYR, F ;

KURZ, H ;

SCHNEIDER, D ;

BRIERE, MA ;

MCDONALD, JW ;

CUNNINGHAM, CE ;

WINTER, HP .

PHYSICAL REVIEW LETTERS, 1993, 71 (12) :1943-1946

[2]

BARNES AJ, UNPUB

[3]

CASTIANG R, P EUR REG C EL MICR

[4]

DAHL DA, 1995, 43 ASMS C MASS SPECT, P717

[5]

DUKER H, 1960, Z METALLKD, V51, P314

[6]

GRIFFITH OH, 1991, ULTRAMICROSCOPY, V36, P1

[7]

Hamza AV, 1999, EUR PHYS J D, V6, P83

[8] Secondary ion coincidence in highly charged ion based secondary ion mass spectroscopy for process characterization [J].

Hamza, AV ;

Schenkel, T ;

Barnes, AV ;

Schneider, DH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1999, 17 (01) :303-305

[9]

HAMZA AV, UNPUB

[10]

MCDONALD J, 1992, PHYS REV LETT, V46, P2297

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