Preparation, microstructural characterisation and tribological behaviour of CNx coatings

被引：33

作者：

Fernández, A ^{[1
]}

Fernández-Ramos, C ^{[1
]}

Sánchez-López, JC ^{[1
]}

机构：

[1] Inst Ciencia Mat, Dept Quim Inorgan, Ctr Invest Cientificas Isla Cartuja, Seville 41092, Spain

来源：

SURFACE & COATINGS TECHNOLOGY | 2003年 / 163卷

关键词：

amorphous carbon nitride; reactive sputtering; microstructure; tribology;

D O I：

10.1016/S0257-8972(02)00615-1

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A review is presented on the main results obtained during the last years on the synthesis and microstructural characterisation of CNx and Si-doped CNx coatings prepared mainly by the magnetron sputtering technique. An exhaustive characterisation by XPS, EELS, IR, XAS and NMR has allowed us to determine the microstructure of the films obtained under different experimental conditions and with different compositions. Thermal stability studies in vacuum and air atmosphere provided also a temperature limit for the practical use of the films. Finally, the relationships between the nature of the films and the friction behaviour are highlighted and discussed. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：527 / 534

页数：8

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