Direct simulation Monte Carlo of inductively coupled plasma and comparison with experiments

Direct simulation Monte Carlo was used to study ion and neutral transport and reaction in a low-gas-pressure high-plasma-density inductively coupled reactor with chlorine (electronegative) chemistry. Electron density and temperature were computed by a self-consistent continuum plasma code and were used as input to the direct simulation Monte Carlo code. Simulation results were compared with experimental data taken in a Gaseous Electronics Conference reference cell modified for inductive plasma operation. Data on the radial distribution of positive ion density (Cl-), negative ion density (Cl-), as well as the energy distribution of ions bombarding the substrate electrode compared favorably with simulation results. In addition, the measured atomic chlorine density variations with pressure and power were captured by the simulation.