Fabrication of three-component micropatterned organosilane monolayer by a stepwise photolithography process

被引：16

作者：

Koga, T ^{[1
]}

Otsuka, H ^{[1
]}

Takahara, A ^{[1
]}

机构：

[1] Kyushu Univ, Inst Fundamental Res Organ Chem, Higashi Ku, Fukuoka 8128581, Japan

来源：

CHEMISTRY LETTERS | 2002年 / 12期

关键词：

D O I：

10.1246/cl.2002.1196

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Three-component micropatterned organosilane monolayer was successfully fabricated on Si-wafer substrate by a stepwise photolithography process. Scanning force microscopic observations revealed that three kinds of organosilane monolayers with different physicochemical properties were area-selectively immobilized on a Si wafer.

引用

页码：1196 / 1197

页数：2

共 10 条

[1]

CALVERT JM, 1993, JPN J APPL PHYS, V32, P5829

[2] Amino-terminated self-assembled monolayer on a SiO2 surface formed by chemical vapor deposition [J].

Hozumi, A ;

Yokogawa, Y ;

Kameyama, T ;

Sugimura, H ;

Hayashi, K ;

Shirayama, H ;

Takai, O .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2001, 19 (04) :1812-1816

[3] Fluoroalkylsilane monolayers formed by chemical vapor surface modification on hydroxylated oxide surfaces [J].

Hozumi, A ;

Ushiyama, K ;

Sugimura, H ;

Takai, O .

LANGMUIR, 1999, 15 (22) :7600-7604

[4] A method for reliable measurement of relative frictional properties of different self-assembled monolayers using frictional force microscopy [J].

Moser, AE ;

Eckhardt, CJ .

THIN SOLID FILMS, 2001, 382 (1-2) :202-213

[5] ESTIMATION OF SURFACE FREE ENERGY OF POLYMERS [J].

OWENS, DK ;

WENDT, RC .

JOURNAL OF APPLIED POLYMER SCIENCE, 1969, 13 (08) :1741-&

[6] ORGANIZED MONOLAYERS BY ADSORPTION .1. FORMATION AND STRUCTURE OF OLEOPHOBIC MIXED MONOLAYERS ON SOLID-SURFACES [J].

SAGIV, J .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1980, 102 (01) :92-98

[7] Micropatterning of alkyl- and fluoroalkylsilane self-assembled monolayers using vacuum ultraviolet light [J].

Sugimura, H ;

Ushiyama, K ;

Hozumi, A ;

Takai, O .

LANGMUIR, 2000, 16 (03) :885-888

[8]

Sugimura H, 2000, IEICE T ELECTRON, VE83C, P1099

[9] CHEMICAL-VAPOR SURFACE MODIFICATION OF POROUS-GLASS WITH FLUOROALKYL-FUNCTIONAL SILANES .1. CHARACTERIZATION OF THE MOLECULAR LAYER [J].

TADA, H ;

NAGAYAMA, H .

LANGMUIR, 1994, 10 (05) :1472-1476

[10] Effect of aggregation state on nanotribological behaviors of organosilane monolayers [J].

Takahara, A ;

Kojio, K ;

Kajiyama, T .

ULTRAMICROSCOPY, 2002, 91 (1-4) :203-213

← 1 →