Complex three-dimensional conformal surfaces formed by atomic layer deposition: computation and experimental verification

被引：21

作者：

Brzezinski, Andrew ^{[1
]}

Chen, Ying-Chieh ^{[1
]}

Wiltzius, Pierre ^{[1
]}

Braun, Paul V. ^{[1
]}

机构：

[1] Univ Illinois, Dept Mat Sci & Engn, Beckman Inst, Urbana, IL 61801 USA

来源：

JOURNAL OF MATERIALS CHEMISTRY | 2009年 / 19卷 / 48期

关键词：

PHOTONIC-CRYSTAL TEMPLATES; NANOSTRUCTURES; INVERSION;

D O I：

10.1039/b914318a

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Atomic layer deposition in complex three-dimensional porous materials is useful for manipulating properties such as pore size, pore connectivity, density, and dielectric constant. In order to calculate a material's properties it is necessary to determine the material distribution. A generally applicable algorithm for determining the material distribution and pore connectivity is presented. Calculations using the algorithm compared favorably with experimental results for the important case of infilling dielectric material into three-dimensional photonic crystal templates.

引用

页码：9126 / 9130

页数：5

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