Fabrication of low-loss and polarisation-insensitive 256 channel arrayed-waveguide grating with 25 GHz spacing using 1.5% Δ waveguides

被引:34
作者
Hida, Y [1 ]
Hibino, Y [1 ]
Itoh, M [1 ]
Sugita, A [1 ]
Himeno, A [1 ]
Ohmori, Y [1 ]
机构
[1] NTT Corp, NTT Photon Labs, Tokai, Ibaraki 3191193, Japan
关键词
D O I
10.1049/el:20000598
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A 256 channel arrayed waveguide grating with a 25 GHz spacing was fabricated on a 4 inch Si wafer using 1.5% Delta silica-based waveguides with a minimum bending radius of 2mm. By improving the fabrication methods of 1.5% Delta waveguides, we have obtained an on-chip loss of 2.7 - 4.7dB, a far-end crosstalk of < -40dB and a polarisation-dependent wavelength shift of < 0.025nm.
引用
收藏
页码:820 / 821
页数:2
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