Measurements of characteristic transients of planar electrostatic probes in cold plasmas

This article describes how to extract accurate information about a plasma from a capacitively coupled planar probe that is biased using pulsed radio-frequency excitation. The conditions necessary to observe correct saturation of the probe current are investigated, particularly the use of correct geometry and biasing for the guard ring. With these precautions the probe is an effective diagnostic for electron tail temperature at energies beyond those probed by conventional cylindrical probes. The dynamic response of the probe is investigated using conventional sweep voltages and shows the onset of displacement current and inertial effects associated with ions and electrons. In addition the effect of insulating films on the probe surface is examined, showing how the probe continues to operate even when it is coated. Characteristic changes caused by the presence of an insulating film give information about its electrical properties and its thickness. (C) 2000 American Institute of Physics. [S0034-6748(00)01707-X].