Development of carbon nanotube-based sensors - A review

被引：199

作者：

Mahar, Benjamin ^{[1
]}

Laslau, Cosmin ^{[1
]}

Yip, Ronnie ^{[1
]}

Sun, Yu ^{[1
]}

机构：

[1] Univ Toronto, Toronto, ON M5S 3G8, Canada

来源：

IEEE SENSORS JOURNAL | 2007年 / 7卷 / 1-2期

关键词：

carbon nanotubes (CNTs); integration; nanoelectromechanical systems (NEMS); sensors;

D O I：

10.1109/JSEN.2006.886863

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Carbon nanotubes (CNTs) have shown great promise as sensing elements in nanoelectromechanical sensors. In this review paper, we discuss the electrical, mechanical, and electromechanical properties of CNTs that are used in such applications. This investigation indicates which nanotube properties should be carefully considered when designing nanotube-based sensors. We then present the primary techniques that have been used for the integration of nanotubes into devices and proceed to give a description of sensors that have been developed using CNTs as active sensing elements.

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页码：266 / 284

页数：19

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