Modified desirability functions for multiple response optimization

被引:175
作者
DelCastillo, E
Montgomery, DC
McCarville, DR
机构
[1] MOTOROLA SEMICOND PROD SECTOR INC,DIV SENSOR PROD,PHOENIX,AZ 85008
[2] ARIZONA STATE UNIV,DEPT IND & MANAGEMENT SYST ENGN,TEMPE,AZ 85287
关键词
desirability; optimization; response surface methodology;
D O I
10.1080/00224065.1996.11979684
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Desirability functions have been used extensively to simultaneously optimize several responses. Since the original formulation of these functions contains non-differentiable points, only search methods can be used to optimize the overall desirability response. Furthermore, all responses are treated as equally important. We present modified desirability functions that are everywhere differentiable so that more efficient gradient-based optimization methods can be used instead. The proposed functions have the extra flexibility of allowing the analyst to assign different priorities among the responses. The methodology is applied to a wire bonding process that occurs in semiconductor manufacturing, an industrial process where multiple responses are common.
引用
收藏
页码:337 / 345
页数:9
相关论文
共 15 条
[1]   DOE/OPT - A SYSTEM FOR DESIGN OF EXPERIMENTS, RESPONSE-SURFACE MODELING, AND OPTIMIZATION USING PROCESS AND DEVICE SIMULATION [J].
BONING, DS ;
MOZUMDER, PK .
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 1994, 7 (02) :233-244
[2]  
Box GEP., 1960, TECHNOMETRICS, V2, P455, DOI [10.1080/00401706.1960.10489912, DOI 10.1080/00401706.1960.10489912, 10.2307/1266454]
[3]   SUPERVISORY RUN-TO-RUN CONTROL OF POLYSILICON GATE ETCH USING IN-SITU ELLIPSOMETRY [J].
BUTLER, SW ;
STEFANI, JA .
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 1994, 7 (02) :193-201
[4]   A NONLINEAR-PROGRAMMING SOLUTION TO THE DUAL RESPONSE PROBLEM [J].
DELCASTILLO, E ;
MONTGOMERY, DC .
JOURNAL OF QUALITY TECHNOLOGY, 1993, 25 (03) :199-204
[5]  
DERRINGER G, 1980, J QUAL TECHNOL, V12, P214, DOI 10.1080/00224065.1980.11980968
[6]  
DERRINGER GC, 1994, QUAL PROG, V27, P51
[7]  
*DES EXPT, 1993, STAT EAS VERS 4 0
[8]  
Harrington E. C., 1965, IND QUALITY CONTROL, V21, P494, DOI DOI 10.1128/AM.13.3.494-495.1965
[9]  
KHURI AI, 1987, RESPONSE DESIGNS ANA
[10]  
Lasdon L. S., 1978, ACM Transactions on Mathematical Software, V4, P34, DOI 10.1145/355769.355773