Microplasma jet at atmospheric pressure

被引:117
作者
Hong, Yong Cheol [1 ]
Uhm, Han Sup [1 ]
机构
[1] Ajou Univ, Dept Mol Sci & Technol, Suwon 443749, South Korea
关键词
D O I
10.1063/1.2400078
中图分类号
O59 [应用物理学];
学科分类号
摘要
A nitrogen microplasma jet operated at atmospheric pressure was developed for treating thermally sensitive materials. For example, the plasma sources in treatment of vulnerable biological materials must operate near the room temperature at the atmospheric pressure, without any risk of arcing or electrical shock. The microplasma jet device operated by an electrical power less than 10 W exhibited a long plasma jet of about 6.5 cm with temperature near 300 K, not causing any harm to human skin. Optical emission measured at the wide range of 280-800 nm indicated various reactive species produced by the plasma jet. (c) 2006 American Institute of Physics.
引用
收藏
页数:3
相关论文
共 20 条
[1]   Hollow cathode cold atmospheric plasma source with monoatomic and molecular gases [J].
Baránková, H ;
Bárdos, L .
SURFACE & COATINGS TECHNOLOGY, 2003, 163 :649-653
[2]   Collisional and radiative processes in high-pressure discharge plasmas [J].
Becker, KH ;
Kurunczi, PF ;
Schoenbach, KH .
PHYSICS OF PLASMAS, 2002, 9 (05) :2399-2404
[3]   Numerical description of discharge characteristics of the plasma needle [J].
Brok, WJM ;
Bowden, MD ;
van Dijk, J ;
van der Mullen, JJAM ;
Kroesen, GMW .
JOURNAL OF APPLIED PHYSICS, 2005, 98 (01)
[4]   Abatement of PFCs from semiconductor manufacturing processes by nonthermal plasma technologies: A critical review [J].
Chang, Moo Been ;
Chang, Jen-Shih .
INDUSTRIAL & ENGINEERING CHEMISTRY RESEARCH, 2006, 45 (12) :4101-4109
[5]   Atmospheric RF plasma effects on the film adhesion property [J].
Chung, YM ;
Jung, MJ ;
Han, JG ;
Lee, MW ;
Kim, YM .
THIN SOLID FILMS, 2004, 447 :354-358
[6]   Characteristics of dielectric barrier glow discharges with a low-frequency generator in nitrogen [J].
Kim, YH ;
Cha, MS ;
Shin, WH ;
Song, YH .
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2003, 43 (05) :732-737
[7]   Generation of large-volume, atmospheric-pressure, nonequilibrium plasmas [J].
Kunhardt, EE .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 2000, 28 (01) :189-200
[8]  
LEE TI, 2006, APPL PHYS LETT, V88
[9]   A uniform glow discharge plasma source at atmospheric pressure [J].
Moon, SY ;
Choe, W ;
Kang, BK .
APPLIED PHYSICS LETTERS, 2004, 84 (02) :188-190
[10]   A comparative study of rotational temperatures using diatomic OH, O2 and N2+ molecular spectra emitted from atmospheric plasmas [J].
Moon, SY ;
Choe, W .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 2003, 58 (2-3) :249-257