Fabrication and characterization of electrokinetic micro pumps

被引：27

作者：

Zeng, SL ^{[1
]}

Chen, CH ^{[1
]}

Mikkelsen, JC ^{[1
]}

Santiago, JG ^{[1
]}

机构：

[1] Stanford Univ, Dept Mech Engn, Microfluid Lab, Stanford, CA 94305 USA

来源：

ITHERM 2000: SEVENTH INTERSOCIETY CONFERENCE ON THERMAL AND THERMOMECHANICAL PHENOMENA IN ELECTRONIC SYSTEMS, VOL 2, PROCEEDINGS | 2000年

关键词：

electrokinetic micropump; two-phase cooling;

D O I：

10.1109/ITHERM.2000.866167

中图分类号：

O414.1 [热力学];

学科分类号：

摘要：

Electrokinetic (EK) micropumps have been fabricated and demonstrated in which electroosmotic flow is used to transport fluids. Deionized water and pure acetonitrile have been used as working fluids to achieve low current density pumping conditions. These EK pumps have no moving parts and can generate maximum pressures of more than 20 atm at 2 kV applied voltage. Minimizing and controlling electrolytic gas generation is a major concern. Gas generated at the downstream electrode surfaces appears to be forced to dissolve into surrounding fluid at high pressure (> 7 atm) condition, and this permits a stable pump operation. Measurements of flow rate have been used to estimate pump structure parameters.

引用

页码：31 / 36

页数：6

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