Angular distribution of ejected atoms from Nd:YAG laser irradiating metals

被引：66

作者：

Torrisi, L ^{[1
]}

Andò, L ^{[1
]}

Ciavola, G ^{[1
]}

Gammino, S ^{[1
]}

Barnà, A ^{[1
]}

机构：

[1] Lab Nazl Sud, I-95123 Catania, Italy

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2001年 / 72卷 / 01期

关键词：

D O I：

10.1063/1.1328404

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A Nd:YAG pulsed laser is employed to irradiate different metals in vacuum at the ECLISSE facility of the Laboratorio Nazionale del Sud, Catania, INFN. Laser pulse energy, 9 ns in width, ranges between 100 and 900 mJ. The ejection of atoms by means of laser irradiation is studied in terms of angular distribution, laser etching yield and film thickness deposited on a substrate. Light elements (Ni, Cu) show an angular distribution that is larger than heavy ones (W, Pb). A theoretical approach, applied to fit experimental data, indicates that the distribution depends on the high power of cos theta and that the flow velocity of ejected atom ranges between 27 000 and 88 000 m/s and the kinetic energy of ejected species ranges between 0.7 and 4.4 keV. (C) 2001 American Institute of Physics.

引用

页码：68 / 72

页数：5

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