Fabrication of intrinsic fibre Fabry-Perot sensors in silica fibres using hydrofluoric acid etching

被引:85
作者
Machavaram, V. R. [1 ]
Badcock, R. A. [1 ]
Fernando, G. F. [1 ]
机构
[1] Univ Birmingham, Dept Met & Mat, Sensors & Composites Res Grp, Birmingham B15 2TT, W Midlands, England
关键词
hydrofluoric acid; fibre optic sensors; Fabry-Perot; intrinsic strain sensor; composites;
D O I
10.1016/j.sna.2007.04.007
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
When a cleaved optical fibre is immersed in hydrofluoric acid, the compositional variation within the core and the cladding results in the core-region being etched at a faster rate. This paper presents details of the experimental procedures that were used to etch SM 800 optical fibres and the characterization of the micro-cavities using a 3D surface profiler, optical and scanning electron microscopy. Two such acid-etched fibres were fusion spliced to create an intrinsic Fabry-Perot cavity. These strain sensors were surface-mounted on to fibre reinforced composite test specimens and subjected to quasi-static and cyclic loading. The intrinsic fibre Fabry-Perot sensors were interrogated using low-coherence interferometry. The output from the intrinsic Fabry-Perot sensors showed excellent correlation with surface-mounted electrical resistance strain gauges during quasi-static and cyclic loading. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:248 / 260
页数:13
相关论文
共 38 条
[1]   A novel MEMS pressure sensor fabricated on an optical fiber [J].
Abeysinghe, DC ;
Dasgupta, S ;
Boyd, JT ;
Jackson, HE .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2001, 13 (09) :993-995
[2]  
[Anonymous], FIBER BRAGG GRATINGS
[3]  
ASARE KO, 1996, J ELECTROCHEM SOC, V143, P1339
[4]  
BORN M, 1991, PRINCIPLES OPTICS, P332
[5]   Silicon dioxide sacrificial layer etching in surface micromachining [J].
Buhler, J ;
Steiner, FP ;
Baltes, H .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1997, 7 (01) :R1-R13
[6]   VIEWING REFRACTIVE-INDEX PROFILES AND SMALL-SCALE INHOMOGENEITIES IN GLASS OPTICAL FIBERS - SOME TECHNIQUES [J].
BURRUS, CA ;
STANDLEY, RD .
APPLIED OPTICS, 1974, 13 (10) :2365-2369
[7]   A simple chemical etching technique for reproducible fabrication of robust scanning near-field fiber probes [J].
Chuang, YH ;
Sun, KG ;
Wang, CJ ;
Huang, JY ;
Pan, CL .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (02) :437-439
[8]   A multi-purpose optical fibre sensor design for fibre reinforced composite materials [J].
Fernando, GF ;
Liu, T ;
Crosby, P ;
Doyle, C ;
Martin, A ;
Brooks, D ;
Ralph, B ;
Badcock, R .
MEASUREMENT SCIENCE AND TECHNOLOGY, 1997, 8 (10) :1065-1079
[9]  
GREENWOOD NN, 2001, CHEM ELEMENTS, P382
[10]  
HOGG H, 1992, ACTIVE MAT ADAPTIVE, P667