High-throughput and etch-selective nanoimprinting and stamping based on fast-thermal-curing poly(dimethylsiloxane)s

A thermally curable poly(dimethylsiloxane)-based nanoimprinting resist allows an extremely fast replication (few seconds) of 70 nm line-width structures at moderate temperatures and low pressures (see figure). The high silicon content of this material also makes it highly resistant to reactive-ion etching, allowing the imprinted pattern to be transferred into SiO2 without any additional hard etching mask. ne imprinted structure can be used as a stamp directly.