Thin-film microlens arrays with non-spherical elements

被引：36

作者：

Grunwald, R ^{[1
]}

Woggon, S ^{[1
]}

Ehlert, R ^{[1
]}

Reinecke, W ^{[1
]}

机构：

[1] INGENIEURBURO OPTIKENTWICKLUNG,D-12489 BERLIN,GERMANY

来源：

PURE AND APPLIED OPTICS | 1997年 / 6卷 / 06期

关键词：

D O I：

10.1088/0963-9659/6/6/008

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Different types of microlens arrays consisting of extremely non-spherical elements have been produced with thin-film deposition methods. SiO2 structures with pitches of 40-750 mu m and element numbers of up to 10(5) have been deposited on rigid quartz and flexible polycarbonate substrates. Axial and radial beam shaping has been investigated theoretically as well as experimentally for selected geometries (Gaussian and double-parabolic profiles, 400 mu m pitch). Oscillating intensity distributions, in particular extended and multiple foci, have been generated by Gaussian-like and double-parabolic phase functions. The specific spatial transformation characteristics can be used for applications in the fields of laser material processing, optical sensing and measuring techniques. Fibre coupling and collimation with non-spherical microlenses have been demonstrated.

引用

页码：663 / 671

页数：9

共 9 条

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