Fabrication and characterisation of (Ba,Sr)TiO3 thin films by sol-gel technique through organic precursor route

被引：18

作者：

Giridharan, NV ^{[1
]}

Varatharajan, R ^{[1
]}

Jayavel, R ^{[1
]}

Ramasamy, P ^{[1
]}

机构：

[1] Anna Univ, Ctr Crystal Growth, Madras 600025, Tamil Nadu, India

来源：

MATERIALS CHEMISTRY AND PHYSICS | 2000年 / 65卷 / 03期

关键词：

BST thin films; sol-gel technique; optical and electrical characterisation;

D O I：

10.1016/S0254-0584(00)00231-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ferroelectric thin films of barium strontium titanate (BST) have been deposited on silicon and quartz substrates by sol-gel technique through organic precursor route. Crystalline films were obtained by post deposition annealing at a temperature of 700 degrees C. X-ray diffraction (XRD) studies have been carried out to assess the crystallinity and phase formation. The surface features of the films, studied by optical microscopy reveal the grain growth pattern. The refractive index of the him has been estimated. Electrical characterisation of the films such as resistivity and C-V measurements in metal-ferroelectric-semiconductor (MFS) configuration have been carried out. The hysteresis behavior observed during the C-V measurements confirms the ferroelectric property of the films. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：261 / 265

页数：5

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