共 13 条
- [1] Bathe K, 2000, FINITE ELEMENT METHO
- [2] Dong S. B., 1972, International Journal for Numerical Methods in Engineering, V4, P155, DOI 10.1002/nme.1620040202
- [3] FRICKE J, 1993, J MICROMECH MICROENG, V3, P100
- [4] Guckel H., 1984, International Electron Devices Meeting. Technical Digest (Cat. No. 84CH2099-0), P223
- [5] GUTTERIGE RJ, 1996, Patent No. 5583291
- [6] POLYCRYSTALLINE SILICON MICROMECHANICAL BEAMS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (06) : 1420 - 1423
- [7] Comparative study of various release methods for polysilicon surface micromachining [J]. MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS, 1997, : 442 - 447
- [9] MENG Q, 1993, J MICROELECTROMECHAN, V2, P128
- [10] NELSON PR, 1995, SPIE P, V2460, P53