Oxidation of vanadium nitride and titanium nitride coatings

被引：194

作者：

Glaser, A.

Surnev, S. ^{[1
]}

Netzer, F. P.

Fateh, N.

Fontalvo, G. A.

Mitterer, C.

机构：

[1] Karl Franzens Univ Graz, Inst Phys Surface & Interface Phys, A-8010 Graz, Austria

[2] Univ Min & Met Leoben, Dept Phys Met & Mat Testing, A-8700 Leoben, Austria

来源：

SURFACE SCIENCE | 2007年 / 601卷 / 04期

基金：

奥地利科学基金会;

关键词：

VN; TiN; hard coatings; XPS; titanium oxides; vanadium oxides;

D O I：

10.1016/j.susc.2006.12.010

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The oxidation of vanadium nitride (VN) and titanium nitride (TiN) coatings in ultra-high vacuum has been investigated in situ by X-ray photoelectron spectroscopy. On the VN coatings mixed oxide layers containing V3+ and V4+ species form at elevated temperatures (>= 600 degrees C) and at high oxygen exposures, which cover completely the VN surface. Under similar oxidation conditions the TiN surface oxidises partially to a mixture of TiO2 and Ti oxynitride (TiOxNy) phases. This oxidation behaviour has been correlated to the tribological properties of the VN and TiN coatings investigated recently. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：1153 / 1159

页数：7

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