Flexible large area thin film position sensitive detectors

被引：15

作者：

Fortunato, F ^{[1
]}

Ferreira, I

Giuliani, F

Martins, R

机构：

[1] Univ Nova Lisboa, Fac Sci & Technol, CENIMAT, Dept Mat Sci, P-2825 Monte De Caparica, Portugal

[2] Univ Nova Lisboa, CEMOP, P-2825 Monte De Caparica, Portugal

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2000年 / 86卷 / 03期

关键词：

flexible sensors; amorphous silicon; position sensitive detectors; polyimide substrates;

D O I：

10.1016/S0924-4247(00)00446-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Large area thin film position sensitive detectors based on amorphous silicon technology have been prepared on polyimide substrates using the conventional plasma-enhanced chemical vapour deposition. The sensors have been characterised by spectral response, light intensity dependence and linearity measurements in a bent state in order to evaluate the properties in real working conditions. The obtained one-dimensional (ID) position sensors with 10 mm width and 20 mm length present a non-linearity of +/-1% which are comparable to the ones produced on glass substrates. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：182 / 186

页数：5

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