Controlling dielectric and optical properties of ordered mesoporous organosilicate films

被引：66

作者：

Balkenende, AR ^{[1
]}

de Theije, FK ^{[1
]}

Kriege, JCK ^{[1
]}

机构：

[1] Philips Res Labs, NL-5656 AA Eindhoven, Netherlands

来源：

ADVANCED MATERIALS | 2003年 / 15卷 / 02期

关键词：

D O I：

10.1002/adma.200390028

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Mesoporous hybrid inorganic-organic silicate films with pendant methyl groups are prepared. With a high organic fraction, these films are hydrophobic, which is important in the fabrication of low-k dielectrics. The refractive index of layers with smaller organic fraction can be switched reversibly over a large refractive index interval by varying the relative humidity (see Figure).

引用

页码：139 / +

页数：6

共 15 条

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