A self-priming and bubble-tolerant piezoelectric silicon micropump for liquids and gases

被引：68

作者：

Linnemann, R ^{[1
]}

Woias, P ^{[1
]}

Senfft, CD ^{[1
]}

Ditterich, JA ^{[1
]}

机构：

[1] Fraunhofer Inst Solid State Technol, D-80686 Munich, Germany

来源：

MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS | 1998年

关键词：

D O I：

10.1109/MEMSYS.1998.659814

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

In this paper a novel silicon micropump for liquids and gases is presented, which is tolerant towards gas-bubbles and which is able to prime itself. The micropump is based on a piezoelectrically driven diaphragm actuator, which is combined with a valve unit consisting of two cantilever valves. The self-priming and bubble-tolerant operation mode was achieved by maximizing the compression ratio, which was realized by minimizing the dead volume of the valve unit as well as of the actuator unit and by maximizing the stroke volume of the pump diaphragm. The optimization of the actuator is based on simulations and experimental investigations of the pump diaphragm displacement. These studies yield the optimal dimensions of the pump diaphragm and the piezoactuator. The piezoeletrically actuated micropump was characterized by investigating the pumprate in dependence of the actuation frequency and the pressure on the inlet and the outlet port of the micropump. As essential results a maximum pumprate of 1ml/min and a maximum backpressure of about 1 bar were measured for water. For gases the pumprate ranges up to 3ml/min.

引用

页码：532 / 537

页数：2