Industrial applications for plasma processes - examples and trends

被引：16

作者：

Suchentrunk, R ^{[1
]}

Staudigl, G

Jonke, D

Fuesser, HJ

机构：

[1] Daimler Benz AG, Res & Technol, Ottobrunn, Germany

[2] Daimler Benz AG, Res & Technol, D-7900 Ulm, Germany

来源：

SURFACE & COATINGS TECHNOLOGY | 1997年 / 97卷 / 1-3期

关键词：

plasma activation; plasma deposition; plasma-stripping; applications;

D O I：

10.1016/S0257-8972(97)00280-6

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The present paper gives an overview of the different methods of plasma treatment and their bandwidth of application. Emphasis is placed on the industrial point of view considering costs, reliability, environmental and social demands. Another item is the trend of research and development activities and the resulting future applications for plasma processes. (C) 1997 Elsevier Science S.A.

引用

页码：1 / 9

页数：9