Variation of the preferred orientation with thickness in barium titanate thin films prepared by pulsed laser deposition

被引:7
作者
Kim, DY
Lee, SG
Park, YK
Park, SJ
机构
[1] Seoul Natl Univ, Sch Mat Sci & Engn, Kwanak Gu, Seoul 151742, South Korea
[2] Korea Univ, Dept Phys, Jochiwon 339800, Chungnam, South Korea
[3] Korea Res Inst Standards & Sci, Taejon 305600, South Korea
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1997年 / 36卷 / 12A期
关键词
BaTiO3; pulsed laser deposition; preferred orientation; thickness dependency; (111) twins;
D O I
10.1143/JJAP.36.7307
中图分类号
O59 [应用物理学];
学科分类号
摘要
In the deposition of BaTiO3 thin films by pulsed laser deposition, the variation of the preferred orientation with thickness was studied. The preferred orientation of the films deposited below 1 mTorr was (100), and did not change with variations in the thickness due to the high adatom mobilities. The preferred orientation of the films deposited above 200 mTorr was (110) which has the highest growth rate in the BaTiO3 perovskite structure, and it did not also change with variations in thickness. During the deposition between 50-100 mTorr, the preferred orientation varied in the order of (111)-(110)-(111) with an increase in the thickness of the film. For this orientation change to occur, the film surface should be rough. This preferred orientation change was thought to be related to the (111) twins of BaTiO3.
引用
收藏
页码:7307 / 7311
页数:5
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