Conducting lanthanum nickel oxide as electrodes for lead zirconate titanate films

被引:11
作者
Zhang, Y [1 ]
Zhou, QF
Chan, HLW
Choy, CL
机构
[1] Hong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R China
[2] Hong Kong Polytech Univ, Ctr Mat Res, Hong Kong, Hong Kong, Peoples R China
关键词
conducting ceramic electrode; LaNiO3 (LNO) ceramic; PZT/LNO interface;
D O I
10.1016/S0040-6090(00)01267-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Lanthanum nickel oxide (LaNiO3 or LNO) is a conducting ceramic which has good potential for use as electrodes in multilayer actuators. In this work, lead zirconate titanate (PZT) films were prepared by a modified sol-gel process on stainless steel substrates. A LNO film prepared by a metal-organic deposition method was spin-coated onto the PZT film and the LNO/PZT him was cofired by rapid thermal processing at various temperatures. A transition layer consisting of a mixture of PZT and LNO was introduced between the LNO and PZT layer in order to enhance adhesion. The electrical resistivity of the LNO films was measured as a function of the sintering temperature and 750 degreesC was found to be the optimum sintering temperature. The microstructures of the LNO/PZT films were studied in a scanning electron microscope (SEM). (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:87 / 90
页数:4
相关论文
共 8 条
[1]   Effect of textured LaNiO3 electrode on the fatigue improvement of Pb(Zr0.53Ti0.47)O-3 thin films [J].
Chen, MS ;
Wu, TB ;
Wu, JM .
APPLIED PHYSICS LETTERS, 1996, 68 (10) :1430-1432
[2]   Solution deposition and heteroepitaxial crystallization of LaNiO3 electrodes for integrated ferroelectric devices [J].
Cho, CR ;
Payne, DA ;
Cho, SL .
APPLIED PHYSICS LETTERS, 1997, 71 (20) :3013-3015
[3]   Fabrication and electrical properties of sol-gel derived BaTiO3 films with metallic LaNiO3 electrode [J].
Li, AD ;
Ge, CZ ;
Lu, P ;
Wu, D ;
Xiong, SB ;
Ming, NB .
APPLIED PHYSICS LETTERS, 1997, 70 (12) :1616-1618
[4]  
Li AD, 1996, APPL PHYS LETT, V68, P1347, DOI 10.1063/1.115930
[5]   Preparation and properties of conductive LaNiO3 thin films by a thermal decomposition of water-based solutions [J].
Ling, Y ;
Ren, W ;
Wu, XQ ;
Zhang, LY ;
Yao, X .
THIN SOLID FILMS, 1997, 311 (1-2) :128-132
[6]  
Liu S., UNPUB
[7]  
SCEEDHAR K, 1992, PHYS REV B, V46, P6382
[8]   Nanocrystalline powder and fibres of lead zirconate titanate prepared by the sol-gel process [J].
Zhou, QF ;
Chan, HLW ;
Choy, CL .
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 1997, 63 (1-3) :281-285