Sidewall-implanted dual-axis piezoresistive cantilever for AFM data storage readback and tracking

被引：8

作者：

Chui, BW ^{[1
]}

Mamin, HJ ^{[1
]}

Terris, BD ^{[1
]}

Rugar, D ^{[1
]}

Kenny, TW ^{[1
]}

机构：

[1] Stanford Univ, Stanford, CA 94305 USA

来源：

MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS | 1998年

关键词：

D O I：

10.1109/MEMSYS.1998.659721

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

We have developed a novel technique for fabricating high-aspect-ratio sidewall-implanted microstructures, and have used it to fabricate a dual-axis piezoresistive cantilever for atomic force microscope (AFM) data storage, The device allows simultaneous, independent detection of vertical and lateral forces without complex signal-separation circuitry. The vertical force sensor of the cantilever can be used for data readback and load servo, while the lateral force sensor can be used for data groove edge detection and track servo. The dual-axis cantilever consists of a flat, triangular probe with a sharp tip, connected to the support by four parallel high-aspect-ratio ribs. Piezoresistors are fabricated on the horizontal surface of the triangular probe: and the vertical sidewalls of the ribs for orthogonal deflection sensing. A special oblique ion implant at approximately 45 degrees to the normal is used to form the piezoresistors. Groove tracking on a spinning disk has been demonstrated using a custom servo controller for load and track servo.

引用

页码：12 / 17

页数：2