Demonstration of slot-waveguide structures on silicon nitride/silicon oxide platform

被引:88
作者
Barrios, C. A.
Sanchez, B.
Gylfason, K. B.
Griol, A.
Sohlstrom, H.
Holgado, M.
Casquel, R.
机构
[1] Univ Politecn Madrid, ISOM, ETSI Telecomunicac, E-28040 Madrid, Spain
[2] Univ Politecn Valencia, NTC, E-46071 Valencia, Spain
[3] Royal Inst Technol, KTH, Sch Elect Engn, Microsyst Technol Lab, SE-10044 Stockholm, Sweden
[4] Univ Politecn Madrid, Ctr Laser, Madrid, Spain
来源
OPTICS EXPRESS | 2007年 / 15卷 / 11期
关键词
D O I
10.1364/OE.15.006846
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We report on the first demonstration of guiding light in vertical slot-waveguides on silicon nitride/silicon oxide material system. Integrated ring resonators and Fabry-Perot cavities have been fabricated and characterized in order to determine optical features of the slot-waveguides. Group index behavior evidences guiding and confinement in the low-index slot region at O-band (1260-1370nm) telecommunication wavelengths. Propagation losses of < 20 dB/cm have been measured for the transverse-electric mode of the slot-waveguides. (C) 2007 Optical Society of America.
引用
收藏
页码:6846 / 6856
页数:11
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