Dual-axis microgyroscope with closed-loop detection

被引：17

作者：

An, S ^{[1
]}

Oh, YS ^{[1
]}

Lee, BL ^{[1
]}

Park, KY ^{[1
]}

Kang, SJ ^{[1
]}

Choi, SO ^{[1
]}

Go, YI ^{[1
]}

Song, CM ^{[1
]}

机构：

[1] Samsung Adv Inst Technol, Micro Syst LAB, Suwon, South Korea

来源：

MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS | 1998年

关键词：

D O I：

10.1109/MEMSYS.1998.659777

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A dual-axis microgyroscope is fabricated by a surface micromachining process. A 7.0 mu m-thick polysilicon layer deposited by LPCVD is used for the vibrating structure. We report the closed-loop rate detection of a microgyroscope based on the rotational vibration of the four plates. In particular, the structure utilizes a simple force-balancing torsional torque which does not need another top electrode layer to reduce the intrinsic non-linearity of a capacitance-type sensor. The gyroscope is tested in a high vacuum chamber for a high Q-factor with hybrid signal-conditioning integrated circuit. The experiment resulted in a noise equivalent signal of 0.1 deg/sec.

引用

页码：328 / 333

页数：2