Design of infrared wavelength-selective microbolometers using planar multimode detectors

被引：29

作者：

Han, SW ^{[1
]}

Kim, JW ^{[1
]}

Sohn, YS ^{[1
]}

Neikirk, DP ^{[1
]}

机构：

[1] Univ Texas, Microelect Res Ctr, Dept Elect & Comp Engn, Austin, TX 78712 USA

来源：

ELECTRONICS LETTERS | 2004年 / 40卷 / 22期

关键词：

D O I：

10.1049/el:20046547

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Multimode microbolometers for wavelength-selective infrared detection have been designed using a genetic algorithm and an electromagnetic model of the planar antenna. Wavelength selectivity can be varied by changing lithographically drawn parameters, with bandwidth narrower than Fabry-Perot microbolometers. The design of a three-colour system covering the 7-14 mum band is presented.

引用

页码：1410 / 1411

页数：2

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