Microcontact printing of alkanethiols on copper and its application in microfabrication

被引：147

作者：

Xia, YN

Kim, E

Mrksich, M

Whitesides, GM

机构：

[1] Department of Chemistry, Harvard University, Cambridge

来源：

CHEMISTRY OF MATERIALS | 1996年 / 8卷 / 03期

关键词：

D O I：

10.1021/cm950464+

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Microcontact printing was used to generate patterned self-assembled monolayers of alkanethiolates on the surfaces of evaporated films of copper. These patterned SAMs could be directly used as ultrathin resists that protected the underlying copper from etching in aqueous solutions of FeCl3/ HCl or FeCl3/NH4Cl. Arrays of junctions of Ag/Ag2O/Cu were fabricated using a multistep procedure that combines metal evaporation, microcontact printing, and selective etching.

引用

页码：601 / &

页数：4

共 19 条

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