Optical second-harmonic probe for ultra-high frequency on-chip interconnects with benzocyclobutene

被引：21

作者：

Nagel, M ^{[1
]}

Meyer, C

Heiliger, HM

Dekorsy, T

Kurz, H

Hey, R

Ploog, K

机构：

[1] Rhein Westfal TH Aachen, Inst Halbleitertech 2, D-52056 Aachen, Germany

[2] Paul Drude Inst Festkorperelekt, D-10117 Berlin, Germany

来源：

APPLIED PHYSICS LETTERS | 1998年 / 72卷 / 09期

关键词：

D O I：

10.1063/1.120952

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report the application of electric field-induced second-harmonic (EFISH) generation for time-resolved measurement of ultra-fast electrical pulses propagating on thin-film microstrip lines fabricated with a polymer based on benzocyclobutene as a dielectric layer on a silicon substrate. This contactless field detection enables the characterization of electric pulses on the transmission line up to 1.95 THz. In comparison to external electro-optic sampling the EFISH technique provides a better characterization tool concerning time-resolution and noninvasiveness. (C) 1998 American Institute of Physics.

引用

页码：1018 / 1020

页数：3

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