The microstructure and properties of thin WO3 films modified by gold

被引：4

作者：

Anisimov, O. V. ^{[1
]}

Maksimova, N. K. ^{[1
]}

Naiden, Yu. P.

Novikov, V. A.

Sevast'yanov, E. Yu. ^{[1
]}

Rudov, F. V.

Chernikov, E. V. ^{[1
]}

机构：

[1] Tomsk State Univ, Siberian Phys Tech Inst, Tomsk 634050, Russia

来源：

RUSSIAN JOURNAL OF PHYSICAL CHEMISTRY A | 2010年 / 84卷 / 07期

基金：

俄罗斯基础研究基金会;

关键词：

SENSING CHARACTERISTICS; NO2; DETECTION; GAS SENSOR;

D O I：

10.1134/S003602441007023X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Direct current magnetron sputtering of a metallic W + Au target or high-frequency magnetron sputtering of WO3 + Au oxide targets was used to prepare thin (about 100 nm) nanocrystalline WO3 films with the addition of gold (disperse layers of catalytic gold were additionally deposited on the surface of films). The composition and micromorphology of the surface of films and the electrical and gas sensitive characteristics of nitrogen dioxide sensors were studied to determine the mechanism of the influence of gold on the properties of WO3 films. The films were shown to contain the beta-WO3 orthorhombic and gamma-WO2.72 monoclinic phases and gold particles. The presence of the nonstoichiometric gamma-WO2.72 phase was shown to increase the concentration of oxygen vacancies in films and decrease the resistance of sensors to 1-2 M Omega. Gold nanoparticles 9-15 nm in size segregated on the surface of semiconductor crystallites and increased the response of sensors to NO2. The conclusion was drawn that deposited catalytic gold layers increased the response to traces of nitrogen dioxide.

引用

页码：1220 / 1225

页数：6

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