Electrostatic micromachine scanning mirror for optical coherence tomography

被引：92

作者：

Zara, JM ^{[1
]}

Yazdanfar, S

Rao, KD

Izatt, JA

Smith, SW

机构：

[1] George Washington Univ, Dept Elect & Comp Engn, Washington, DC 20052 USA

[2] Duke Univ, Dept Biomed Engn, Durham, NC 27708 USA

来源：

OPTICS LETTERS | 2003年 / 28卷 / 08期

关键词：

D O I：

10.1364/OL.28.000628

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Compact electrostatic micromirror structures for use in the scanning arm of an optical coherence tomography (OCT) system are described. These devices consist of millimeter-scale mirrors resting upon micrometer-scale polyimide hinges that are tilted by a linear micromachine actuator, the integrated force array (IFA). The IFA is a network of deformable capacitor cells that electrostatically contract with an applied voltage. The support structures, hinges, and actuators are fabricated by photolithography from polyimide-upon-silicon wafers. These devices were inserted into the scanning arm of an experimental OCT imaging system to produce in vitro and in vivo images at frame rates of 4 to 8 Hz. (C) 2003 Optical Society of America.

引用

页码：628 / 630

页数：3

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