Hard X-ray microscopy with reflecting mirrors status and perspectives of the ESRF technology

Third generation synchrotron sources allow imaging at high energy with sub-micron resolution. The reflective optics systems, with their high efficiency and achromatic nature are promising approaches towards that goal. The Kirkpatrick Baez (KB) technology, being developed at the ESRF, has achieved a measured spot size of 0.16X0.21 mum at 20.5 keV on the ID19 beamline. Despite non-perfect optics, nearly diffraction size has been achieved in one direction. Examples of projection full field and microfluorescence scanning imaging are reported. The expected performance of these systems under coherent illumination and their applications are discussed in view of the progress achieved in optical manufacturing technology.