Application of MEMS technology to micro fuel cells

被引：67

作者：

Yamazaki, Y ^{[1
]}

机构：

[1] Tokyo Inst Technol, Interdisciplinary Grad Sch Sci & Engn, Yokohama, Kanagawa 2268502, Japan

来源：

ELECTROCHIMICA ACTA | 2004年 / 50卷 / 2-3期

关键词：

MEMS; micro fuel cell; portable application; porous silicon;

D O I：

10.1016/j.electacta.2004.01.092

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

The advantage which we can get it when we apply the micro fabrication technology to the preparation processes of small fuel cells is investigated. The deep reactive ion etching for the gas channel preparation and the formation of porous silicon layers for MEA supports by electrochemical process are the key technologies to improve the MEMS-based micro fuel cells. The MEMS technology can control the fine and precise flows of the fuel, air, and water in the electrodes, which may improve the current and power densities in a small fuel cell. (C) 2004 Elsevier Ltd. All rights reserved.

引用

页码：663 / 666

页数：4