Advances in SAW-based gas sensors

被引:58
作者
Caliendo, C
Verardi, P
Verona, E
D'Amico, A
Di Natale, C
Saggio, G
Serafini, M
Paolesse, R
Huq, SE
机构
[1] CNR, Ist Acust Om Corbino, I-00189 Rome, Italy
[2] Univ Roma Tor Vergata, Dipartimento Ingn Elettr, I-00133 Rome, Italy
[3] Univ Roma Tor Vergata, Dipartimento Chim, I-00133 Rome, Italy
[4] Rutherford Appleton Lab, Cent Microstruct Facil, Didcot OX11 0QX, Oxon, England
关键词
D O I
10.1088/0964-1726/6/6/005
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
This paper deals with some advances in surface acoustic wave (SAW) sensor research relating to the use of both a new chemically interactive material (metal porphyrin) and new amplifiers for low-noise SAW oscillators, which are illustrated and discussed in some detail. The trend toward SAW matrixes, implemented on silicon, required for more sensitive chemical image systems, has led to the observation of coupling effects between adjacent SAW oscillators, even if the electronics were not implemented on Si. This effect must be considered at design level in order to achieve a higher resolution value in detecting either single chemical species or chemical images.
引用
收藏
页码:689 / 699
页数:11
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