X-ray reflectivity study of the structural characteristics of BaTiO3/LaNiO3 superlattice

被引：14

作者：

Liang, YC

Wu, TB

Lee, HY ^{[1
]}

Liu, HJ

机构：

[1] Natl Synchrotron Radiat Res Ctr, Hsinchu 30077, Taiwan

[2] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 30043, Taiwan

来源：

THIN SOLID FILMS | 2004年 / 469卷

关键词：

sputtering; surface structure; interface; superlattices;

D O I：

10.1016/j.tsf.2004.06.195

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

An artificial superlattice of BaTiO3/LaNiO3 (BTO/LNO) was grown epitaxially on an Nb-doped SrTiO3 (001) single-crystalline substrate with a dual-gun rf magnetron sputtering system. The structural characteristics of the superlattice films were studied mainly by X-ray reflectivity. Formation of a superlattice structure was confirmed from the appearance of Bragg peaks separated by Kiessig fringes in X-ray reflectivity curves and a crystal truncation rod (CTR) spectrum. The surface and interfacial roughness of the superlattice were derived from the fitted curves for specular reflectivity. A conformal relationship between consecutive BTO and LNO layers was observed from off-specular scattering. According to the fitted results and atomic-force microscopy images, the evolution of surface structure follows the Stranski-Krastanov (S-K) growth mode, in which the surface roughness increased with the thickening of sublayers. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：500 / 504

页数：5

共 27 条

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