Micro balloon actuators for aerodynamic control

被引:28
作者
Grosjean, C [1 ]
Lee, GB [1 ]
Hong, W [1 ]
Tai, YC [1 ]
Ho, CM [1 ]
机构
[1] CALTECH, Micromachining Lab, Pasadena, CA 91125 USA
来源
MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS | 1998年
关键词
D O I
10.1109/MEMSYS.1998.659748
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
A robust, large-force, targe-deflection micro balloon actuator for aerodynamic (maneuvering) control of transonic aircraft has been developed. Using a novel process, high yield linear arrays of silicone balloons on a robust silicon substrate have been fabricated that can deflect vertically iu excess of one nun. Balloon actuators have been tested under cyclic conditions to assess reliability. The actuators have been characterized in a wind tunnel to assess their suitability as aerodynamic control surfaces and flight-tested on a jet fighter to assess their resistance to varied temperatures and pressures at high velocity.
引用
收藏
页码:166 / 171
页数:2
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