Synthesis and characterization of anatase-TiO2 thin films

被引：120

作者：

Sankapal, BR ^{[1
]}

Lux-Steiner, MC ^{[1
]}

Ennaoui, A ^{[1
]}

机构：

[1] Hahn Meitner Inst Berlin GmbH, Dept Heterogeneous Mat Syst, Div Solar Energy Res, D-14109 Berlin, Germany

来源：

APPLIED SURFACE SCIENCE | 2005年 / 239卷 / 02期

关键词：

synthesis; characterization; titanium dioxide; thin films;

D O I：

10.1016/j.apsusc.2004.05.142

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A new and effective method for the preparation of nanocrystalline TiO2 (anatase) thin films is presented. This method is based on the use of peroxo-titanium complex as a single precursor. Post-annealing treatment is necessary to convert the deposited amorphous film into TiO2 (anatase) phase. The films obtained are uniform, compact and free of pinholes. A wide range of techniques are used for characterization, namely X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), transmission electron microscopy (TEM), energy-dispersive X-ray analysis (EDAX) and UV-Vis-NIR spectrophotometer. Glass, indium-doped tin oxide (ITO) and quartz are used as substrates. TiO2 (anatase) phase with (101) preferred orientation is obtained for the films. Byproduct (collected powder) consists of the same crystal structure. The optical measurement reveals the indirect bandgap of 3.2 eV. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：165 / 170

页数：6

共 24 条

[1]

[Anonymous], [No title captured]

[2]

Cullity B.D., 1978, ELEMENTS XRAY DIFFRA, V2nd, P102

[3] The surface science of titanium dioxide [J].