A micromachined solid state integrated gas sensor for the detection of aromatic hydrocarbons

被引：47

作者：

Gotz, A

Gracia, I

Cane, C

Lora-Tamayo, E

Horrillo, MC

Getino, J

Garcia, C

Gutierrez, J

机构：

[1] CSIC, IMB, Ctr Nacl Microelect, Bellaterra 08193, Spain

[2] CSIC, CETEF, IFA, Lab Sensores, E-28006 Madrid, Spain

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1997年 / 44卷 / 1-3期

关键词：

FEM thermal simulations; micromachined; benzene; toluene;

D O I：

10.1016/S0925-4005(97)00171-8

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Preliminary studies to obtain an integrated solid state gas microsensor are presented in this work. FEM thermal simulations have been carried out to optimize the membrane and heater layouts with the aim of increasing temperature uniformity on the sensitive area and decreasing power consumption. Heater materials and full process flow have been defined in order to achieve compatibility with a CMOS technology with minor changes. On the other hand, first tests of sensitivity with pure tin oxide and Pt-doped tin oxide deposited by a sputtering process on alumina substrates, for benzene and toluene, have given good results for low concentrations (100 ppm) at 400 and 300 degrees C respectively. (C) 1997 Elsevier Science S.A.

引用

页码：483 / 487

页数：5