Fabrication of microelectron gun arrays using laser micromachining

被引:10
作者
Choi, SS
Jung, MY
Kim, DW
Yakshin, MA
Park, JY
Kuk, Y
机构
[1] Sun Moon Univ, Dept Phys, Ansan 336840, Chungnam, South Korea
[2] Yonsei Univ, Res Ctr Atom Scale Surface Sci, Seoul 120749, South Korea
[3] Seoul Natl Univ, Dept Phys, Seoul 151742, South Korea
关键词
D O I
10.1016/S0167-9317(98)00037-9
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have successfully fabricated miniaturized field emission tip arrays with microcolumns using microfabrication technology and laser micromachining. The nanosize Si-tip arrays with 20nm radii were fabricated using conventional microfabrication techniques such as an isotropic reactive ion etching(RIE), a sharpening oxidation procedure, etc. The microcolumns were fabricated using laser micromachining techniques. Preparatory laser micromachining has been performed on the various materials such as Si wafer, Mo, Ta and 304 stainless steel. Various holes with radii ranging from 2 to 100 micron on these materials were successfully fabricated using TEM00 Yag:Nd3+ laser. The patterns of electron beams through the laser-fabricated microcolumns were observed using a micro channel plate and a charge coupled device (CCD) camera.
引用
收藏
页码:167 / 170
页数:4
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