Fabrication of metal nanowire using carbon nanotube as a mask

被引：67

作者：

Yun, WS

Kim, J

Park, KH

Ha, JS

Ko, YJ

Park, K

Kim, SK

Doh, YJ

Lee, HJ

Salvetat, JP

Forró, L

机构：

[1] ETRI, Telecommun Basic Res Lab, Taejon 305600, South Korea

[2] Seoul Natl Univ, Dept Chem, Seoul 151742, South Korea

[3] KRISS, Elect Grp, Yusong Gu, Taejon 305600, South Korea

[4] POSTECH, Dept Phys, Pohang 790784, South Korea

[5] Ecole Polytech Fed Lausanne, Dept Phys, CH-1015 Lausanne, Switzerland

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2000年 / 18卷 / 04期

关键词：

D O I：

10.1116/1.582349

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We report on the fabrication of metal nanowires on an insulating substrate using carbon nanotubes as a new kind of mask material. By irradiating Ar+ ions of 300 eV energy on a nanotube-coated Au/Ti thin layer on a SiO2 substrate, Au/Ti nanowires were successfully formed just underneath the nanotube, indicating that the carbon nanotubes had acted as a good mask against the argon ion bombardment, The Au/Ti wire of a few nanometers in width was frequently observed among the wires of various widths, After the formation of the Au/Ti nanowires, the carbon nanotube on the metal nanowire could be removed by atomic force microscope. (C) 2000 American Vacuum Society. [S0734-2101(00)07404-2].

引用

页码：1329 / 1332

页数：4

共 14 条

[1] CAPILLARITY-INDUCED FILLING OF CARBON NANOTUBES [J].