Ablation with a single micropatterned KrF laser pulse:: quantitative evidence of transient liquid microflow driven by the plume pressure gradient at the surface of polyesters

被引:20
作者
Weisbuch, F
Tokarev, VN
Lazare, S
Débarre, D
机构
[1] Univ Bordeaux 1, Lab Physicochim Mol, UMR 5803, CNRS, F-33405 Talence, France
[2] Univ Paris 11, Inst Elect Fondamentale, UMR 8622, F-91405 Orsay, France
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2003年 / 76卷 / 04期
关键词
D O I
10.1007/s00339-002-2050-z
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A microscopic flow of a transient liquid film produced by KrF laser ablation is evidenced on targets of PET and PEN. Experiments were done by using single pulses of the excimer laser beam micropattemed with the aid of submicron projection optics and grating masks. The samples of various crystalline states, ablated with a grating-forming beam (period Lambda = 3.7 mum), were precisely measured by atomic force microscopy, in order to evidence any deviation from the ablation behavior predicted by the current theory (combination of ablation curve and beam profile). This was confirmed by comparing various behaviors dependent on the polymer nature (PC, PET and PEN). PC is a normally ablating polymer in the sense that the ablated profile can be predicted with previous theory neglecting liquid-flow effects. This case is called 'dry' ablation and PC is used as a reference material. But, for some particular samples like crystalline PET, it is revealed that during ablation a film of transient liquid, composed of various components, which are discussed, can flow under the transient action of the gradient of the pressure of the ablation plume and resolidify at the border of the spot after the end of the pulse. This mechanism is further supported by a hydrodynamics theoretical model in which a laser-induced viscosity drop and the gradient of the plume pressure play an important role. The volume of displaced liquid increases with fluence (0.5 to 2 J/cm(2)) and satisfactory quantitative agreement is obtained with the present model. The same experiment done on the same PET polymer but prepared in the amorphous state does not show microflow, and such an amorphous sample behaves like the reference PC ('dry' ablation). The reasons for this surprising result are discussed.
引用
收藏
页码:613 / 620
页数:8
相关论文
共 55 条
[1]   MORPHOLOGICAL-CHANGES OF THE SURFACE-STRUCTURE OF POLYMERS DUE TO EXCIMER LASER-RADIATION - A SYNERGETIC EFFECT [J].
BAHNERS, T ;
SCHOLLMEYER, E .
JOURNAL OF APPLIED PHYSICS, 1989, 66 (04) :1884-1886
[2]   Nanotribology of biaxially oriented poly(ethylene terephthalate) film [J].
Beake, BD ;
Leggett, GJ ;
Shipway, PH .
POLYMER, 2001, 42 (16) :7025-7031
[3]   Scanning force microscopy investigation of poly (ethylene terephthalate) modified by argon plasma treatment [J].
Beake, BD ;
Ling, JSG ;
Leggett, GJ .
JOURNAL OF MATERIALS CHEMISTRY, 1998, 8 (08) :1735-1742
[4]   NEAR-THRESHOLD LASER SPUTTERING OF GOLD [J].
BENNETT, TD ;
GRIGOROPOULOS, CP ;
KRAJNOVICH, DJ .
JOURNAL OF APPLIED PHYSICS, 1995, 77 (02) :849-864
[5]  
Brandrup J, 1989, POLYM HDB
[6]   HIGH-TEMPERATURE VISCOELASTICITY AND HEAT-SETTING OF POLY(ETHYLENE-TEREPHTHALATE) [J].
BUCKLEY, CP ;
SALEM, DR .
POLYMER, 1987, 28 (01) :69-85
[7]   STUDY OF THE MORPHOLOGY OF SEMICRYSTALLINE POLY(ETHYLENE-TEREPHTHALATE) BY HYDROLYSIS ETCHING [J].
CAGIAO, ME ;
CALLEJA, FJB ;
VANDERDONCKT, C ;
ZACHMANN, HG .
POLYMER, 1993, 34 (10) :2024-2029
[8]   ULTRAVIOLET-LASER-INDUCED ABLATION OF POLY(ETHYLENE-TEREPHTHALATE) [J].
DYER, PE ;
OLDERSHAW, GA ;
SIDHU, J .
JOURNAL OF PHYSICAL CHEMISTRY, 1991, 95 (24) :10004-10009
[9]   NANOSECOND PHOTOACOUSTIC STUDIES ON ULTRAVIOLET-LASER ABLATION OF ORGANIC POLYMERS [J].
DYER, PE ;
SRINIVASAN, R .
APPLIED PHYSICS LETTERS, 1986, 48 (06) :445-447
[10]   PHYSICAL STUDY OF LASER-PRODUCED PLASMA IN CONFINED GEOMETRY [J].
FABBRO, R ;
FOURNIER, J ;
BALLARD, P ;
DEVAUX, D ;
VIRMONT, J .
JOURNAL OF APPLIED PHYSICS, 1990, 68 (02) :775-784