A highly stable SRAM memory cell with top-gated P--N drain poly-Si TFTs for 1.5V operation

被引:27
作者
Hayashi, F
Ohkubo, H
Takahashi, T
Horiba, S
Noda, K
Uchida, T
Shimizu, T
Sugawara, N
Kumashiro, S
机构
来源
IEDM - INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST 1996 | 1996年
关键词
D O I
10.1109/IEDM.1996.553585
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A novel memory cell has been proposed for low voltage operated, high speed and high density SRAMs. Features of this cell are (1) high performance poly-Si TFT loads utilizing bipolar action positively, and (2) a node contact structure which keeps current driveability of TFTs to the cell nodes high by the elimination of parasitic high resistance regions. The minimum operation voltage of 1.5 V has been confirmed by 0.3 micrometer design rule 64 kbit SRAMs without a boosted word-line scheme.
引用
收藏
页码:283 / 286
页数:4
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