Dry-etching method for fabricating photonic-crystal waveguides in nonlinear-optical polymers

被引：18

作者：

Inoue, S ^{[1
]}

Kajikawa, K ^{[1
]}

Aoyagi, Y ^{[1
]}

机构：

[1] Tokyo Inst Technol, Interdisciplinary Grad Sch Sci & Engn, Midori Ku, Yokohama, Kanagawa 2268502, Japan

来源：

APPLIED PHYSICS LETTERS | 2003年 / 82卷 / 18期

关键词：

D O I：

10.1063/1.1572962

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Nonlinear optical (NLO) polymer is proposed as one of the best candidates for nonlinear photonic crystal (PC) waveguides. A dry etching technique for this material is established at the suboptical wavelength scale needed to fabricate NLO polymer PC waveguides, with the good processability achieved in this material demonstrated by the successful fabrication of a PC waveguide in NLO polymer. Sharp resonances originating from coupling to photonic band modes are observed in the optical reflectance spectra of this waveguide, with resonant frequencies found to depend on the angle and in-plane propagation lattice direction of incident light. (C) 2003 American Institute of Physics.

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页码：2966 / 2968

页数：3

相关论文

共 18 条

[1] 2ND-ORDER NONLINEARITY OF A NOVEL DIAZO-DYE-ATTACHED POLYMER [J].

AMANO, M ;

KAINO, T .

JOURNAL OF APPLIED PHYSICS, 1990, 68 (12) :6024-6028

[2] Photonic band-structure effects in the reflectivity of periodically patterned waveguides [J].

Astratov, VN ;

Whittaker, DM ;

Culshaw, IS ;

Stevenson, RM ;

Skolnick, MS ;

Krauss, TF ;

De La Rue, RM .

PHYSICAL REVIEW B, 1999, 60 (24) :16255-16258

[3] Three-dimensional control of light in a two-dimensional photonic crystal slab [J].

Chow, E ;

Lin, SY ;

Johnson, SG ;

Villeneuve, PR ;

Joannopoulos, JD ;

Wendt, JR ;

Vawter, GA ;

Zubrzycki, W ;

Hou, H ;

Alleman, A .

NATURE, 2000, 407 (6807) :983-986

[4] Mode matching for second-harmonic generation in photonic crystal waveguides [J].

Cowan, AR ;

Young, JF .

PHYSICAL REVIEW B, 2002, 65 (08) :1-6

[5] Photonic-bandgap microcavities in optical waveguides [J].

Foresi, JS ;

Villeneuve, PR ;

Ferrera, J ;

Thoen, ER ;

Steinmeyer, G ;

Fan, S ;

Joannopoulos, JD ;

Kimerling, LC ;

Smith, HI ;

Ippen, EP .

NATURE, 1997, 390 (6656) :143-145

[6] Dry development in an O2/SO2 plasma for sub-0.18 μm top layer imaging processes [J].

Goethals, AM ;

Van Roey, F ;

Sugihara, T ;

Van den Hove, L ;

Vertommen, J ;

Klippert, W .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (06) :3322-3333

[7] STRONG LOCALIZATION OF PHOTONS IN CERTAIN DISORDERED DIELECTRIC SUPERLATTICES [J].

JOHN, S .

PHYSICAL REVIEW LETTERS, 1987, 58 (23) :2486-2489

[8] Guided modes in photonic crystal slabs [J].

Johnson, SG ;

Fan, SH ;

Villeneuve, PR ;

Joannopoulos, JD ;

Kolodziejski, LA .

PHYSICAL REVIEW B, 1999, 60 (08) :5751-5758

[9] Attenuation of optical transmission within the band gap of thin two-dimensional macroporous silicon photonic crystals [J].

Leonard, SW ;

van Driel, HM ;

Busch, K ;

John, S ;

Birner, A ;

Li, AP ;

Müller, F ;

Gösele, U ;

Lehmann, V .

APPLIED PHYSICS LETTERS, 1999, 75 (20) :3063-3065

[10] Experimental demonstration of guiding and bending of electromagnetic waves in a photonic crystal [J].

Lin, SY ;

Chow, E ;

Hietala, V ;

Villeneuve, PR ;

Joannopoulos, JD .

SCIENCE, 1998, 282 (5387) :274-276