A multilayer structure for Love-mode acoustic sensors

被引：73

作者：

Du, J ^{[1
]}

Harding, GL ^{[1
]}

机构：

[1] CSIRO, Div Telecommun & Ind Phys, Lindfield, NSW 2070, Australia

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 65卷 / 2-3期

关键词：

acoustic sensors; Love mode; polymer/SiO2; mass sensitivity; temperature coefficient of frequency;

D O I：

10.1016/S0924-4247(97)01698-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel multilayer structure, consisting of polymer/SiO2/ST-quartz, has been evaluated for Love-mode acoustic sensors. The properties of these new devices have been compared with those of SiO2/quartz and polymer/quartz devices. Mass sensitivity, insertion loss, temperature coefficient of the oscillation frequency and frequency stability are studied as a function of the layer thickness. Optimized devices exhibit higher sensitivity than both the SiO2/quartz and the polymer/quartz devices produced here. Reduced temperature coefficient of frequency can be obtained in the polymer/SiO2/ST-quartz devices due to a compensating effect of the polymer and SiO2 films. Some of the devices have been operated efficiently in water with good stability, which is promising for biosensing applications. (C) 1998 Elsevier Science S.A.

引用

页码：152 / 159

页数：8

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