Growth of diamond and nickel carbide crystals in the Ni-C-H system

被引:23
作者
Badzian, A
Badzian, T
机构
[1] Materials Research Laboratory, Pennsylvania State University, University Park
基金
美国国家科学基金会;
关键词
CVD diamond; nucleation; Ni-C-H phases; atomic hydrogen;
D O I
10.1016/0925-9635(96)80011-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Simultaneous growth of diamond and nickel carbide on a graphite substrate was observed. Nickel carbide appeared as a non-stoichiometric interstitial solid solution possessing the NaCl-type structure. The nucleation and growth of diamond was conducted by microwave plasma chemical vapor deposition. The CH4-H-2 plasma produces intensive mass transport in the separate nickel carbide crystals resulting in coalescence. A hypothesis of the formation of gaseous organometallic molecules is described and the role of atomic hydrogen which alters the Ni-C-H equilibria is discussed.
引用
收藏
页码:93 / 101
页数:9
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